Patent Assignment
Reel/Frame 011942/0205
Assignment of Assignor's Interest
Recorded: 2001-07-03
Pages: 2
Assignors
STAMM, UWE
Executed: 2001-03-26
ALBRECHT, HANS-STEPHAN
Executed: 2001-03-27
NOWINSKI, GUENTER
Executed: 2001-03-26
Assignee
LAMBDA PHYSIK AG
HANS-BOCKLER-STRASSE 12, D-37079 GOTTINGEN, GERMANY
Covered Property
(1)
Method and Apparatus for Compensation of Beam Property Drifts Detected by Measurement Systems Outside of an Excimer Laser