Patent Assignment
Reel/Frame 011207/0928
Assignment of Assignor's Interest
Recorded: 2000-10-03
Pages: 3
Assignee
SILICON VALLEY GROUP, INC.
101 METRO DRIVE, SUITE 400, SAN JOSE, CALIFORNIA, 95110
Covered Property
(1)
Method and System for Selective Linewidth Optimization During a Lithographic Process
Patent:
6,509,952 →
Application:
09/575,997 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.