Patent Assignment
Reel/Frame 011626/0561
Assignment of Assignor's Interest
Recorded: 2001-03-19
Pages: 3
Assignor
AMARTUR, SUNDAR
Executed: 2001-03-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
In-Situ Detection of Thin-Metal Interface Using Optical Interference
Patent:
6,664,557 →
Application:
09/812,535 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.