Patent Assignment
Reel/Frame 011709/0422
Assignment of Assignor's Interest
Recorded: 2001-04-09
Pages: 3
Assignee
SPEEDFAM-IPEC CORPORATION
305 N 54TH STREET, CHANDLER, ARIZONA, 85226
Covered Property
(1)
Method and Apparatus for Optical Endpoint Calibration in Cmp
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.