Patent Application
Utility
App. No. 09/829,493
· Confirmation No. 8090
METHOD AND APPARATUS FOR OPTICAL ENDPOINT CALIBRATION IN CMP
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-09 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-04-09 | SPEC |
Specification | 16 | View | |
| 2001-04-09 | CLM |
Claims | 9 | View | |
| 2001-04-09 | ABST |
Abstract | 1 | View | |
| 2001-04-09 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2001-04-09 | OATH |
Oath or Declaration filed | 8 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
356/326
Prosecution
- Examiner
- LEE, SEUNG H
- Art Unit
- 2876
- Docket No.
- 35013.7100
- Confirmation No.
- 8090
Publication
- Pub. No.
- US20030020909A1
- Pub. Date
- 2003-01-30
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-09-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-09
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Quick Facts
- App. No.
- 09/829,493
- Filed
- 2001-04-09
- Granted
- 2003-04-15
- Pub. No.
- US20030020909A1
- Examiner
- LEE, SEUNG H
- Art Unit
- 2876
- PTA
- 0 days
External Links