Patent Assignment
Reel/Frame 011835/0364
Assignment of Assignor's Interest
Recorded: 2001-05-23
Pages: 3
Assignors
TANAKA, MASAHIKO
Executed: 2001-05-11
IKEMOTO, MANABU
Executed: 2001-05-09
YOKOGAWA, NAOAKI
Executed: 2001-05-09
Assignee
ANELVA CORPORATION
5-8-1, YOTSUYA, FUCHU-SHI, TOKYO 183, JAPAN
Covered Property
(1)
Thin-Film Disposition Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.