Patent Assignment
Reel/Frame 012034/0148
Assignment of Assignor's Interest
Recorded: 2001-07-27
Pages: 5
Assignors
IGHUCHI, SOUICHIROU
Executed: 2001-07-24
WATANABE, TAKAYUKI
Executed: 2001-07-24
KIYONO, JUNJI
Executed: 2001-07-24
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method of Forming a Trench Isolation Structure Resistant to Hot Phosphoric Acid by Extending Trench Liner to Shoulder Portions