IP Library › Patent Application 09916429
Patent Application Utility
App. No. 09/916,429 · Confirmation No. 8845

METHOD OF FORMING A TRENCH ISOLATION STRUCTURE RESISTANT TO HOT PHOSPHORIC ACID BY EXTENDING TRENCH LINER TO SHOULDER PORTIONS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-07-27 TRNA Transmittal of New Application 2 View
2001-07-27 SPEC Specification 8 View
2001-07-27 CLM Claims 5 View
2001-07-27 ABST Abstract 1 View
2001-07-27 DRW Drawings-only black and white line drawings 5 View
2001-07-27 OATH Oath or Declaration filed 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
09/916,429
Filed
2001-07-27
Granted
2003-04-22
Pub. No.
US20020064943A1
Examiner
DANG, PHUC T
Art Unit
2818
PTA
0 days