Patent Assignment
Reel/Frame 012056/0422
Assignment of Assignor's Interest
Recorded: 2001-08-08
Pages: 2
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2001-06-07
SETIJA, IRWAN DANI
Executed: 2001-06-07
MOS, EVERHARDUS CORNELIS
Executed: 2001-06-07
Assignee
ASM LITHOGRAPHY B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Lithographic Projection Apparatus, a Method for Determining a Position of a Substrate Alignment Mark, a Device Manufacturing Method and Device Manufactured Thereby
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.