Patent Assignment
Reel/Frame 012096/0310
Assignment of Assignor's Interest
Recorded: 2001-08-21
Pages: 2
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Floating Particle Inspection Method and Its Apparatus and a Semiconductor Device Processing Apparatus