Patent Application
Utility
App. No. 09/933,185
· Confirmation No. 7012
FLOATING PARTICLE INSPECTION METHOD AND ITS APPARATUS AND A SEMICONDUCTOR DEVICE PROCESSING APPARATUS
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-08 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-08-21 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-21 | SPEC |
Specification | 40 | View | |
| 2001-08-21 | CLM |
Claims | 4 | View | |
| 2001-08-21 | ABST |
Abstract | 1 | View | |
| 2001-08-21 | DRW |
Drawings-only black and white line drawings | 21 | View | |
| 2001-08-21 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-08-21 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Hiroyuki Nakano
Yokohama, JAPAN
Toshihiko Nakata
Hiratsuka, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/9
G01N21/9501
G01N21/94
H01J2237/0225
Prosecution
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- Customer No.
- 20457
- Docket No.
- 501.36971PX1
- Confirmation No.
- 7012
Foreign Priority
2001-207214
·
2001-07-09
·
JAPAN
Publication
- Pub. No.
- US20020006731A1
- Pub. Date
- 2002-01-17
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-21
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Quick Facts
- App. No.
- 09/933,185
- Filed
- 2001-08-21
- Granted
- 2003-09-02
- Pub. No.
- US20020006731A1
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- PTA
- 0 days
External Links