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App. No. 10/231,267 · Confirmation No. 4440

SEMICONDUCTOR DEVICE PROCESSING METHOD AND PLASMA PROCESSING METHOD AND ITS APPARATUS

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2004-09-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-09-10 SPEC Specification 1 View
2004-09-10 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-09-08 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-08-19 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-19 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-19 SRFW Search information including classification, databases and other search related notes 2 View
2004-05-12 WFEE Fee Worksheet (SB06) 1 View
2004-04-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-04-16 CLM Claims 11 View
2004-04-16 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2004-04-16 XT/ Extension of Time 1 View
2003-12-16 CTNF Non-Final Rejection 6 View
2003-12-16 892 List of references cited by examiner 1 View
2003-12-08 SRNT Examiner's search strategy and results 2 View
2002-11-19 LET. Miscellaneous Incoming Letter 2 View
2002-11-19 OATH Oath or Declaration filed 2 View
2002-11-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-11-19 CLM Claims 10 View
2002-11-19 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2002-11-19 SPEC Specification 60 View
2002-11-19 CLM Claims 15 View
2002-10-03 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-08-30 TRNA Transmittal of New Application 2 View
2002-08-30 SPEC Specification 44 View
2002-08-30 CLM Claims 14 View
2002-08-30 ABST Abstract 1 View
2002-08-30 DRW Drawings-only black and white line drawings 14 View
2002-08-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-08-30 SRFW Search information including classification, databases and other search related notes 1 View
2002-08-30 FWCLM Index of Claims 1 View
2002-08-30 TRNA Transmittal of New Application 2 View
2002-08-30 DRW Drawings-only black and white line drawings 15 View
2002-08-30 SPEC Specification 45 View
2002-08-30 CLM Claims 15 View
2002-08-30 ABST Abstract 1 View
2002-08-30 WFEE Fee Worksheet (SB06) 1 View
2002-08-30 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/231,267
Filed
2002-08-30
Granted
2004-11-30
Pub. No.
US20030054655A1
Art Unit
3761
PTA
-31 days