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App. No. 09/791,677 · Confirmation No. 9862

METHOD AND ITS APPARATUS FOR DETECTING FLOATING PARTICLES IN A PLASMA PROCESSING CHAMBER AND AN APPARATUS FOR PROCESSING A SEMICONDUCTOR DEVICE

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2003-10-22 CLM Claims 12 View
2003-10-22 DRW Drawings-only black and white line drawings 1 View
2003-10-22 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-22 FWCLM Index of Claims 1 View
2003-10-22 SRFW Search information including classification, databases and other search related notes 1 View
2003-08-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-08-08 SPEC Specification 6 View
2003-08-08 CLM Claims 12 View
2003-08-08 DRW Drawings-only black and white line drawings 1 View
2003-08-08 REM Applicant Arguments/Remarks Made in an Amendment 15 View
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2003-08-08 XT/ Extension of Time 1 View
2003-04-08 CTNF Non-Final Rejection 8 View
2003-04-08 892 List of references cited by examiner 1 View
2003-04-08 1449 List of References cited by applicant and considered by examiner 2 View
2003-03-28 SRNT Examiner's search strategy and results 1 View
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2003-03-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2003-02-21 CTRS Requirement for Restriction/Election 6 View
2001-09-04 LET. Miscellaneous Incoming Letter 7 View
2001-09-04 SPEC Specification 42 View
2001-09-04 CLM Claims 7 View
2001-09-04 ABST Abstract 1 View
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2001-09-04 OATH Oath or Declaration filed 4 View
2001-09-04 XT/ Extension of Time 1 View
2001-09-04 TRNA Transmittal of New Application 7 View
2001-09-04 SPEC Specification 42 View
2001-09-04 CLM Claims 7 View
2001-09-04 ABST Abstract 1 View
2001-09-04 DRW Drawings-only black and white line drawings 15 View
2001-06-04 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2001-05-08 FRPR Certified Copy of Foreign Priority Application 27 View
2001-04-12 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2001-04-12 FOR Foreign Reference 6 View
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2001-04-12 FOR Foreign Reference 34 View
2001-04-12 FOR Foreign Reference 12 View
2001-04-12 FOR Foreign Reference 26 View
2001-04-12 FOR Foreign Reference 5 View
2001-04-12 FOR Foreign Reference 7 View
2001-02-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-02-26 SRFW Search information including classification, databases and other search related notes 1 View
2001-02-26 FWCLM Index of Claims 1 View
2001-02-26 TRNA Transmittal of New Application 3 View
2001-02-26 SPECNO Specification - Not in English 40 View
2001-02-26 DRW Drawings-only black and white line drawings 16 View
2001-02-26 WFEE Fee Worksheet (SB06) 1 View
2001-02-26 WFEE Fee Worksheet (SB06) 1 View
2001-02-26 WCLM Claims Worksheet (PTO-2022) 1 View
2001-02-26 TRNA Transmittal of New Application 3 View
2001-02-26 SPEC Specification 33 View
2001-02-26 CLM Claims 6 View
2001-02-26 ABST Abstract 1 View
2001-02-26 DRW Drawings-only black and white line drawings 16 View
2001-02-26 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
09/791,677
Filed
2001-02-26
Granted
2004-03-30
Pub. No.
US20020016068A1
Art Unit
1763
PTA
-159 days