IP Library › Assignment 012357/0333
Patent Assignment
Reel/Frame 012357/0333

Assignment of Assignor's Interest

Recorded: 2001-09-04 Pages: 2
Assignors
NAKANO, HIROYUKI
Executed: 2001-03-15
NAKATA, TOSHIHIKO
Executed: 2001-03-15
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property (1)
Method and Its Apparatus for Detecting Floating Particles in a Plasma Processing Chamber and an Apparatus for Processing a Semiconductor Device
Patent: 6,712,928 →
Application: 09/791,677 →
Publication: US 2002/0016068
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Nov 20, 2008
From: HITACHI, LTD.
To: RENESAS TECHNOLOGY CORP.
Reel/Frame 021861/0117 →
Merger Jul 30, 2010
From: RENESAS TECHNOLOGY CORP.
To: RENESAS ELECTRONICS CORPORATION
Reel/Frame 025204/0512 →