Patent Assignment
Reel/Frame 012130/0183
Assignment of Assignor's Interest
Recorded: 2001-08-28
Pages: 4
Assignor
CHEN, CHARLES
Executed: 2001-08-16
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, ARIZONA, 85226
Covered Property
(1)
Method and Apparatus for Optical Endpoint Detection During Chemical Mechanical Polishing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.