Granted Patent
Utility
US 6,618,130
· Confirmation No. 5858
METHOD AND APPARATUS FOR OPTICAL ENDPOINT DETECTION DURING CHEMICAL MECHANICAL POLISHING
Inventor:
Charles Chen
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-14 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-07-14 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2003-07-14 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-08-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-28 | SPEC |
Specification | 9 | View | |
| 2001-08-28 | CLM |
Claims | 7 | View | |
| 2001-08-28 | ABST |
Abstract | 1 | View | |
| 2001-08-28 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2001-08-28 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Charles Chen
Sunnyvale, CA
Attorneys & Agents of Record
Classification
USPC
356/73
B24B37/013
H10P52/402
B24B37/042
B24B49/12
Prosecution
- Examiner
- STAFIRA, MICHAEL PATRICK
- Art Unit
- 2877
- Docket No.
- 34759.8100
- Confirmation No.
- 5858
Publication
- Pub. No.
- US20030053042A1
- Pub. Date
- 2003-03-20
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-09-28
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Quick Facts
- Patent No.
- US 6,618,130
- App. No.
- 09/941,109
- Filed
- 2001-08-28
- Granted
- 2003-09-09
- Pub. No.
- US20030053042A1
- Examiner
- STAFIRA, MICHAEL PATRICK
- Art Unit
- 2877
- PTA
- 0 days
External Links