Assignment of Assignor's Interest

Recorded: 2001-08-28 Pages: 5

Assignors

HERB, JOHN D.

Executed: 2001-08-14

TEENY, NED W.

Executed: 2001-08-14

SCHULTZ, STEPHEN C.

Executed: 2001-08-14

Assignee

SPEEDFAM-IPEC CORPORATION

305 NORTH 54TH STREET, CHANDLER, ARIZONA, 85226

Covered Property (1)

Method and Apparatus for Sensing a Wafer in a Carrier

Patent: 6,568,991 →

Application: 09/941,110 →

Publication: US 2003/0045205

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.