Patent Application
Utility
App. No. 09/941,110
· Confirmation No. 5865
METHOD AND APPARATUS FOR SENSING A WAFER IN A CARRIER
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-08-28 | TRNA |
Transmittal of New Application | 5 | View | |
| 2001-08-28 | ADS |
Application Data Sheet | 1 | View | |
| 2001-08-28 | SPEC |
Specification | 19 | View | |
| 2001-08-28 | CLM |
Claims | 6 | View | |
| 2001-08-28 | ABST |
Abstract | 1 | View | |
| 2001-08-28 | DRW |
Drawings-only black and white line drawings | 16 | View | |
| 2001-08-28 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
451/6
B24B37/30
H10P72/78
H10P72/0608
B24B37/0053
B24B49/10
Prosecution
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- Customer No.
- 29906
- Docket No.
- 004.0028 (SFI-953)
- Confirmation No.
- 5865
Publication
- Pub. No.
- US20030045205A1
- Pub. Date
- 2003-03-06
Patent Term Adjustment
0days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-09-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-08-28
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Quick Facts
- App. No.
- 09/941,110
- Filed
- 2001-08-28
- Granted
- 2003-05-27
- Pub. No.
- US20030045205A1
- Examiner
- NGUYEN, DUNG V
- Art Unit
- 3723
- PTA
- 0 days
External Links