Patent Assignment
Reel/Frame 012171/0265
Invalid Recording. See Document Recorded at Reel 012385 Frame 0981. (Re-Record to Correct the Recordation Date)
Recorded: 2001-09-07
Pages: 2
Assignors
HOSHINO, TOMOHISA
Executed: 2001-09-07
VEZIN, VINCENT
Executed: 2001-09-07
CHUNG, GISHI
Executed: 2001-09-07
Assignee
TOKYO ELECTRON LIMITED
MINATO-KU, 3-6, AKASAKA 5-CHOME, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Fabrication Process of a Semiconductor Device Including a Cvd Process of a Metal Film
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.