IP Library › Assignment 012207/0178
Patent Assignment
Reel/Frame 012207/0178

Assignment of Assignor's Interest

Recorded: 2001-09-28 Pages: 4
Assignors
SRIVASTAVA, ASEEM KUMAR
Executed: 2001-09-17
SAKTHIVEL, PALANIKUMARAN
Executed: 2001-09-17
SAWIN, HERBERT HAROLD
Executed: 2001-09-11
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Method and Apparatus for Micro-Jet Enabled, Low-Energy Ion Generation and Transport in Plasma Processing
Patent: 6,761,796 →
Application: 09/905,043 →
Publication: US 2002/0144785
Related Assignments (4)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrective Assignment to Add a Page to a Previously Recorded Assignment on Reel 012207 Frame 0178 Feb 10, 2004
From: SRIVASTAVA, ASEEM KUMAR; SAKTHIVEL, PALANIKUMARAU; SAWIN, HERBERT HAROLD
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 014322/0297 →
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →