Assignment of Assignor's Interest

Recorded: 2001-09-24 Pages: 4

Assignors

MORIYA, TSUYOSHI

Executed: 2001-05-21

ITO, NATSUKO

Executed: 2001-05-21

UESUGI, FUMIHIKO

Executed: 2001-05-21

Assignee

NEC CORPORATION

MINATO-KU, 7-1, SHIBA 5-CHOME, TOKYO, JAPAN

Covered Property (1)

Semiconductor device manufacturing apparatus and method for manufacturing a semiconductor device

Application: 09/962,169 →

Publication: US 2002/0037652

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.