IP Library › Patent Application 09962169
Patent Application Utility
App. No. 09/962,169 · Confirmation No. 8234

Semiconductor device manufacturing apparatus and method for manufacturing a semiconductor device

Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2004-06-30 ABN Abandonment 2 View
2001-09-24 TRNA Transmittal of New Application 2 View
2001-09-24 SPEC Specification 29 View
2001-09-24 CLM Claims 9 View
2001-09-24 ABST Abstract 1 View
2001-09-24 DRW Drawings-only black and white line drawings 9 View
2001-09-24 OATH Oath or Declaration filed 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
09/962,169
Filed
2001-09-24
Pub. No.
US20020037652A1
Examiner
LE, THAO P
Art Unit
2818