Patent Assignment
Reel/Frame 012258/0700
Assignment of Assignor's Interest
Recorded: 2001-10-15
Pages: 6
Assignee
SENSYS INSTRUMENTS CORPORATION, A CORP. OF CALIFORNIA
2090 DUANE AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Database Interpolation Method for Optical Measurement of Diffractive Microstructures
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Mar 10, 2004
From: SENSYS INSTRUMENTS CORPORATION
To: THERMA-WAVE, INC.
Reel/Frame 015054/0003 →
Assignment of Assignor's Interest
Oct 7, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 016851/0953 →
Assignment of Assignor's Interest
Oct 24, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 017136/0621 →