IP Library Assignment 015054/0003
Patent Assignment
Reel/Frame 015054/0003

Assignment of Assignor's Interest

Recorded: 2004-03-10 Pages: 2
Assignor
SENSYS INSTRUMENTS CORPORATION
Executed: 2004-02-10
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539
Covered Property (1)
Database Interpolation Method for Optical Measurement of Diffractive Microstructures
Patent: 6,768,967 →
Application: 09/927,177 →
Publication: US 2002/0038196
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Oct 15, 2001
From: JOHNSON, KENNETH C.; STANKE, FRED E.
To: SENSYS INSTRUMENTS CORPORATION, A CORP. OF CALIFORNIA
Reel/Frame 012258/0700 →
Assignment of Assignor's Interest Oct 7, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 016851/0953 →
Assignment of Assignor's Interest Oct 24, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 017136/0621 →