Patent Assignment
Reel/Frame 015054/0003
Assignment of Assignor's Interest
Recorded: 2004-03-10
Pages: 2
Assignor
SENSYS INSTRUMENTS CORPORATION
Executed: 2004-02-10
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539
Covered Property
(1)
Database Interpolation Method for Optical Measurement of Diffractive Microstructures
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Oct 15, 2001
From: JOHNSON, KENNETH C.; STANKE, FRED E.
To: SENSYS INSTRUMENTS CORPORATION, A CORP. OF CALIFORNIA
Reel/Frame 012258/0700 →
Assignment of Assignor's Interest
Oct 7, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 016851/0953 →
Assignment of Assignor's Interest
Oct 24, 2005
From: THERMA-WAVE, INC.
To: TOKYO ELECTRON LIMITED
Reel/Frame 017136/0621 →