Patent Assignment
Reel/Frame 012332/0451
Assignment of Assignor's Interest
Recorded: 2001-11-26
Pages: 3
Assignee
ANGSTRON SYSTEMS, INC.
3350 SCOTT BOULEVARD #62, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method for Integrated in-Situ Cleaning and Subsequent Atomic Layer Deposition Within a Single Processing Chamber
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.