Patent Assignment
Reel/Frame 012422/0655
Assignment of Assignor's Interest
Recorded: 2001-12-21
Pages: 2
Assignors
BOYD, JOHN M.
Executed: 2001-12-21
WEI, DAVID
Executed: 2001-12-21
GOTKIS, YEHIEL
Executed: 2001-12-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method and Apparatus for Reducing Compressed Dry Air Usage During Chemical Mechanical Planarization
Patent:
6,656,024 →
Application:
10/029,742 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.