Patent Assignment
Reel/Frame 012472/0873
Corrective Assignment to Correct the Last Name of the Third Inventor, Granneman, Previously Recorded on Reel 012229 Frame 0894, Assignor Confirms the Assignment of the Entire Interest.
Recorded: 2002-01-22
Pages: 3
Assignors
RAAIJMAKERS, IVO
Executed: 2001-09-20
SOININEN, PEKKA T.
Executed: 2001-09-11
GRANNEMAN, ERNST H.A.
Executed: 2001-10-01
Assignee
ASM MICROCHEMISTRY OY
KUTOJANTIE 2B, ESPOO, FIN-0, FINLAND
Covered Property
(1)
Method of Fabricating Trench Isolation Structures for Integrated Circuits Using Atomic Layer Deposition
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.