Patent Assignment
Reel/Frame 012574/0069
Assignment of Assignor's Interest
Recorded: 2002-01-28
Pages: 5
Assignors
YANG, CHARLES CHIUN-CHIEH
Executed: 2002-01-23
HERB, JOHN D.
Executed: 2002-01-25
SCHULTZ, STEPHEN C.
Executed: 2002-01-25
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, ARIZONA, 85226
Covered Property
(1)
Polishing Pad Window for a Chemical-Mechanical Polishing Tool
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.