Patent Assignment
Reel/Frame 012647/0855
Assignment of Assignor's Interest
Recorded: 2002-02-21
Pages: 3
Assignors
JANOS, ALAN C.
Executed: 2002-02-12
FERRIS, DAVID
Executed: 2002-02-12
BERRY, IVAN
Executed: 2002-01-28
URY, MICHAEL G.
Executed: 2002-01-14
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma Process and Apparatus
Related Assignments
(4)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →
Change of Name
Feb 18, 2015
From: HERAEUS NOBLELIGHT FUSION UV INC.
To: HERAEUS NOBLELIGHT AMERICA LLC
Reel/Frame 035021/0864 →