Patent Assignment
Reel/Frame 012662/0656
Assignment of Assignor's Interest
Recorded: 2002-03-08
Pages: 4
Assignors
NAKASUJI, MAMORU
Executed: 2002-02-01
NOJI, NOBUHARU
Executed: 2002-02-01
SATAKE, TOHRU
Executed: 2002-02-01
KIMBA, TOSHIFUMI
Executed: 2002-02-01
HATAKEYAMA, MASAHIRO
Executed: 2002-02-01
WATANABE, KENJI
Executed: 2002-02-01
SOBUKAWA, HIROSI
Executed: 2002-02-01
KARIMATA, TSUTOMU
Executed: 2002-02-01
YOSHIKAWA, SHOJI
Executed: 2002-02-01
OOWADA, SHIN
Executed: 2002-02-01
SAITO, MUTSUMI
Executed: 2002-02-01
HAMASHIMA, MUNEKI
Executed: 2002-02-01
Assignees
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Inspecting Substrate, Substrate Inspecting System and Electron Beam Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.