Patent Assignment
Reel/Frame 014957/0971
Assignment of Assignor's Interest
Recorded: 2004-01-27
Pages: 4
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Method for Inspecting Substrate, Substrate Inspecting System and Electron Beam Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.