Patent Assignment
Reel/Frame 012675/0839
Assignment of Assignor's Interest
Recorded: 2002-03-06
Pages: 5
Assignee
RUDOLPH TECHNOLOGIES, INC.
ONE RUDOLPH ROAD, FLANDERS, NEW JERSEY, 07836
Covered Property
(1)
Method and Apparatus for Decreasing Thermal Loading and Roughness Sensitivity in a Photoacoustic Film Thickness Measurement System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.