Patent Assignment
Reel/Frame 012693/0108
Assignment of Assignor's Interest
Recorded: 2002-03-12
Pages: 3
Assignor
GALBURT, DANIEL N.
Executed: 2002-03-07
Assignee
ASML US INC.
77 DANBURY ROAD, WILTON, CONNECTICUT, 06897
Covered Property
(1)
Method, System, and Apparatus for Management of Reaction Loads in a Lithography System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.