IP Library › Granted Patent US 6,784,978
Granted Patent Utility
US 6,784,978 · Confirmation No. 5809

METHOD, SYSTEM, AND APPARATUS FOR MANAGEMENT OF REACTION LOADS IN A LITHOGRAPHY SYSTEM

Inventor: Daniel N. Galburt
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2004-06-18 LET. Miscellaneous Incoming Letter 2 View
2004-06-18 LET. Miscellaneous Incoming Letter 2 View
2004-05-21 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2004-05-13 NOA Notice of Allowance and Fees Due (PTOL-85) 2 View
2004-05-13 1449 List of References cited by applicant and considered by examiner 1 View
2004-05-10 XRUSH Internal Response to Printer Query from Technology Center(TC) 2 View
2003-12-30 RUSH Printer Query form, used by the publications branch 4 View
2003-12-30 XRUSH Internal Response to Printer Query from Technology Center(TC) 4 View
2003-12-23 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-12-23 LET. Miscellaneous Incoming Letter 3 View
2003-12-23 DRW Drawings-only black and white line drawings 20 View
2003-10-15 IDS Information Disclosure Statement (IDS) Form (SB08) 8 View
2003-10-02 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-02 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-10-02 1449 List of References cited by applicant and considered by examiner 2 View
2003-10-02 892 List of references cited by examiner 1 View
2003-10-02 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-02 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-02 FWCLM Index of Claims 1 View
2003-05-29 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-02-04 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
2002-12-13 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-09-25 FOR Foreign Reference 10 View
2002-09-25 FOR Foreign Reference 8 View
2002-09-25 FOR Foreign Reference 13 View
2002-09-25 FOR Foreign Reference 33 View
2002-09-25 FOR Foreign Reference 73 View
2002-09-12 LET. Miscellaneous Incoming Letter 2 View
2002-09-12 PA.. Power of Attorney 2 View
2002-08-06 PETDEC Petition Decision 2 View
2002-05-20 LET. Miscellaneous Incoming Letter 4 View
2002-04-22 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2002-04-10 CTMS Miscellaneous Action with shortened statutory period (SSP) 3 View
2002-03-12 TRNA Transmittal of New Application 6 View
2002-03-12 ADS Application Data Sheet 1 View
2002-03-12 SPEC Specification 31 View
2002-03-12 CLM Claims 7 View
2002-03-12 ABST Abstract 1 View
2002-03-12 DRW Drawings-only black and white line drawings 19 View
2002-03-12 OATH Oath or Declaration filed 2 View
2002-03-12 LET. Miscellaneous Incoming Letter 1 View
2002-03-12 TRNA Transmittal of New Application 7 View
2002-03-12 WFEE Fee Worksheet (SB06) 1 View
2002-03-12 WCLM Claims Worksheet (PTO-2022) 1 View
2002-03-12 ADS Application Data Sheet 1 View
2002-03-12 SPEC Specification 31 View
2002-03-12 CLM Claims 7 View
2002-03-12 ABST Abstract 1 View
2002-03-12 DRW Drawings-only black and white line drawings 19 View
2002-03-12 OATH Oath or Declaration filed 2 View
2002-03-07 OATH Oath or Declaration filed 2 View
2002-02-14 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,784,978
App. No.
10/095,070
Filed
2002-03-12
Granted
2004-08-31
Pub. No.
US20030174304A1
Examiner
NGUYEN, HUNG
Art Unit
2851
PTA
-195 days