IP Library › Assignment 012753/0954
Patent Assignment
Reel/Frame 012753/0954

Assignment of Assignor's Interest

Recorded: 2002-03-26 Pages: 3
Assignors
PHERAND, MICHEL
Executed: 2002-03-18
WEED, ALLAN D.
Executed: 2002-03-18
Assignee
AXCELIS TECHNOLOGIES, INC.
DENIS ROBITAILLE, 108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Wafer Pedestal Tilt Mechanism
Patent: 6,727,509 →
Application: 10/023,516 →
Publication: US 2003/0111617
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Consent and License Agreement Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Agreement Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →