Patent Assignment
Reel/Frame 012807/0667
Assignment of Assignor's Interest
Recorded: 2002-04-17
Pages: 2
Assignors
TAKAHASHI, YOUJI
Executed: 2002-02-18
IIDA, TSUTOMU
Executed: 2002-02-18
UMEMOTO, TSUYOSHI
Executed: 2002-02-18
KASHIBE, MAKOTO
Executed: 2002-02-18
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHINBASHI, 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Power Supply, a Semiconductor Making Apparatus and a Semiconductor Wafer Fabricating Method Using the Same
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.