Granted Patent
Utility
US 6,713,885
· Confirmation No. 3433
POWER SUPPLY, A SEMICONDUCTOR MAKING APPARATUS AND A SEMICONDUCTOR WAFER FABRICATING METHOD USING THE SAME
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-12-05 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-01-16 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2003-10-16 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2003-10-16 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2003-10-16 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2003-10-16 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-10-16 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-10-16 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-10-16 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-08-13 | ELC. |
Response to Election / Restriction Filed | 2 | View | |
| 2003-08-13 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2003-08-13 | FOR |
Foreign Reference | 8 | View | |
| 2003-08-13 | FOR |
Foreign Reference | 10 | View | |
| 2003-08-13 | FOR |
Foreign Reference | 11 | View | |
| 2003-08-13 | FOR |
Foreign Reference | 6 | View | |
| 2003-08-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2003-08-07 | FOR |
Foreign Reference | 17 | View | |
| 2003-08-07 | FOR |
Foreign Reference | 10 | View | |
| 2003-08-07 | FOR |
Foreign Reference | 12 | View | |
| 2003-08-07 | FOR |
Foreign Reference | 12 | View | |
| 2003-08-07 | FOR |
Foreign Reference | 8 | View | |
| 2003-07-25 | CTRS |
Requirement for Restriction/Election | 5 | View | |
| 2002-04-17 | OATH |
Oath or Declaration filed | 4 | View | |
| 2002-04-17 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2002-03-18 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2002-02-26 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-02-26 | SPEC |
Specification | 25 | View | |
| 2002-02-26 | CLM |
Claims | 6 | View | |
| 2002-02-26 | ABST |
Abstract | 1 | View | |
| 2002-02-26 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-02-26 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-02-26 | FWCLM |
Index of Claims | 1 | View | |
| 2002-02-26 | TRNA |
Transmittal of New Application | 2 | View | |
| 2002-02-26 | SPEC |
Specification | 25 | View | |
| 2002-02-26 | CLM |
Claims | 6 | View | |
| 2002-02-26 | ABST |
Abstract | 1 | View | |
| 2002-02-26 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2002-02-26 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-02-26 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-02-26 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Youji Takahashi
Kudamatsu, JAPAN
Tsutomu Iida
Kudamatsu, JAPAN
Tsuyoshi Umemoto
Yamato, JAPAN
Makoto Kashibe
Tokuyama, JAPAN
Attorneys & Agents of Record
Classification
USPC
257/798
H01J37/32174
G01R31/40
H01J37/32082
Prosecution
- Examiner
- LE, THAO P
- Art Unit
- 2818
- Customer No.
- 20457
- Docket No.
- 500.41283X00
- Confirmation No.
- 3433
Publication
- Pub. No.
- US20030162309A1
- Pub. Date
- 2003-08-28
Patent Term Adjustment
0days
CHANGE OF NAME AND ADDRESS
Recorded 2020-03-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-04-17
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Quick Facts
- Patent No.
- US 6,713,885
- App. No.
- 10/082,160
- Filed
- 2002-02-26
- Granted
- 2004-03-30
- Pub. No.
- US20030162309A1
- Examiner
- LE, THAO P
- Art Unit
- 2818
- PTA
- 0 days
External Links