IP Library › Assignment 012828/0431
Patent Assignment
Reel/Frame 012828/0431

Assignment of Assignor's Interest

Recorded: 2002-04-23 Pages: 3
Assignors
TSACOYEANES, JAMES G.
Executed: 2002-04-10
COSTON, SCOTT D.
Executed: 2002-04-10
Assignee
ASML US, INC.
77 DANBURY ROAD, WILTON, CONNECTICUT, 06897
Covered Property (1)
System and Method for Improving Linewidth Control in a Lithography Device by Varying the Angular Distribution of Light in an Illuminator as a Function of Field Position
Patent: 6,888,615 →
Application: 10/127,505 →
Publication: US 2003/0197842
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Jun 19, 2003
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 013743/0510 →
Merger Aug 6, 2004
From: ASM LITHOGRAPHY, INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 014953/0042 →
Conversion Aug 6, 2004
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 014953/0047 →