Patent Assignment
Reel/Frame 012998/0025
Assignment of Assignor's Interest
Recorded: 2002-06-14
Pages: 3
Assignors
FREITAG, ANSGAR
Executed: 2002-04-29
BINGEL, ULRICH
Executed: 2002-05-06
DISTL, JOSEF
Executed: 2002-04-29
HAMM, UWE W.
Executed: 2002-04-26
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Optical Beam Guidance System and Method for Preventing Contamination of Optical Components Contained Therein
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.