Patent Assignment
Reel/Frame 013068/0052
Assignment of Assignor's Interest
Recorded: 2002-07-08
Pages: 2
Assignors
MURAKI, MASATO
Executed: 2002-05-20
SOHDA, YASUNARI
Executed: 2002-05-29
HASHIMOTO, SHINICHI
Executed: 2002-06-06
Assignees
CANON KABUSHIKI KAISHA
OHTA-KU, 3-30-2 SHIMOMARUKO, TOKYO, JAPAN
HITACHI, LTD.
CHIYODA-KU, 6, KANDA SURUGADAI 4-CHOME, TOKYO, JAPAN
ADVANTEST CORPORATION
NERIMA-KU, 32-1, ASAHI-CHO 1-CHOME, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Exposure Apparatus, Device Manufacturing Method, and Charged Particle Beam Applied Apparatus
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.