Patent Assignment
Reel/Frame 013074/0783
Assignment of Assignor's Interest
Recorded: 2002-07-02
Pages: 2
Assignors
HOLDERER, HUBERT
Executed: 2002-06-04
WEBER, ULRICH
Executed: 2002-04-12
KOHL, ALEXANDER
Executed: 2002-04-12
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Apparatus for Tilting a Carrier for Optical Elements
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.