Patent Assignment
Reel/Frame 015502/0579
Change of Name
Recorded: 2004-06-28
Pages: 4
Assignor
CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Executed: 2003-12-09
Assignee
CARL ZEISS SMT AG
CARL-ZEISS STRASSE 22, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Apparatus for Tilting a Carrier for Optical Elements
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.