Assignment of Assignor's Interest

Recorded: 2002-07-18 Pages: 3

Assignors

JI, BING

Executed: 2002-07-18

MOTIKA, STEPHEN ANDREW

Executed: 2002-07-18

PEARLSTEIN, STEPHEN ANDREW

Executed: 2002-07-18

KARWACKI, JR., EUGENE JOSEPH

Executed: 2002-07-18

Assignee

AIR PRODUCTS AND CHEMICALS, INC.

PATENT DEPARTMENT, 7201 HAMILTON BOULEVARD, ALLENTOWN, PENNSYLVANIA, 18195

Covered Property (1)

Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials

Application: 10/198,509 →

Publication: US 2004/0014327

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.