Patent Assignment
Reel/Frame 013164/0541
Assignment of Assignor's Interest
Recorded: 2002-07-31
Pages: 3
Assignor
BENVENISTE, VICTOR M.
Executed: 2002-07-29
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Symmetric Beamline and Methods for Generating a Mass-Analyzed Ribbon Ion Beam
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.