Patent Assignment
Reel/Frame 013167/0053
Assignment of Assignor's Interest
Recorded: 2002-10-11
Pages: 4
Assignor
TZOU, EUGENE
Executed: 2002-10-10
Assignee
APPLIED MATERIALS, INC.
PATENT DEPARTMENT P.O. BOX 450A, M/S #2061, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Undoped and Fluorinated Amorphous Carbon Film as Pattern Mask for Metal Etch
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.