Patent Assignment
Reel/Frame 013178/0164
Assignment of Assignor's Interest
Recorded: 2002-08-02
Pages: 3
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPARTMENT, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Undoped and Fluorinated Amorphous Carbon Film as Pattern Mask for Metal Etch
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.