Patent Assignment
Reel/Frame 013219/0502
Assignment of Assignor's Interest
Recorded: 2002-08-21
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Productivity Enhancing Thermal Sprayed Yttria-Containing Coating for Plasma Reactor