Patent Assignment
Reel/Frame 013225/0234
Assignment of Assignor's Interest
Recorded: 2002-08-21
Pages: 2
Assignor
TAYLOR, THEODORE M.
Executed: 2002-08-16
Assignee
MICRON TECHNOLOGY, INC.
8000 SOUTH FEDERAL WAY, BOISE, IDAHO, 83706-9632
Covered Property
(1)
Apparatus and Method for Conditioning a Polishing Pad Used for Mechanical and/or Chemical-Mechanical Planarization