Patent Assignment
Reel/Frame 013261/0037
Assignment of Assignor's Interest
Recorded: 2002-09-03
Pages: 3
Assignors
HOFF, ALBRECHT
Executed: 2002-07-05
MAUL, GUENTER
Executed: 2002-07-07
MEUHLBEYER, MICHAEL
Executed: 2002-07-22
MEHLKOPP, KLAUS
Executed: 2002-07-22
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASS 22,, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Optical System with Isolated Measuring Structure
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.