Patent Assignment
Reel/Frame 013297/0084
Assignment of Assignor's Interest
Recorded: 2002-09-10
Pages: 2
Assignors
JI, BING
Executed: 2002-09-09
YANG, JAMES HSU-KUANG
Executed: 2002-09-09
ELDER, DELWIN L.
Executed: 2002-09-06
KARWACKI, EUGENE JOSEPH, JR.
Executed: 2002-09-09
Assignee
AIR PRODUCTS AND CHEMICALS, INC.
PATENT DEPARTMENT, 7201 HAMILTON BOULEVARD, ALLENTOWN, PENNSYLVANIA, 18195-1501
Covered Property
(1)
Cleaning of processing chambers with dilute NF3 plasmas
Application:
10/238,803 →
Publication:
US 2004/0045577
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.